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发明名称
ACTUATOR
摘要
申请公布号
EP0347846(A3)
申请公布日期
1990.10.31
申请号
EP19890111222
申请日期
1989.06.20
申请人
HITACHI, LTD.
发明人
MASAKI, RYOSO;KAYAMA, MASAHIRO;HAYASHIDA, HIROSHI HITACHI SHIMIZU SHATAKU 2042;NIHEI, HIDEKI;KATAYAMA, YASUNORI;NAGASE, HIROSHI;MATSUDA, TOSHIHIKO;KAMIYAMA, KENZO
分类号
B25J9/04;B25J17/02;B25J19/02;H01L41/09;(IPC1-7):H01L41/08
主分类号
B25J9/04
代理机构
代理人
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地址
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