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发明名称
METHOD FOR EPITAXY
摘要
申请公布号
JPH02267189(A)
申请公布日期
1990.10.31
申请号
JP19890089019
申请日期
1989.04.08
申请人
SEIKO EPSON CORP
发明人
IWAMATSU SEIICHI
分类号
C30B23/08;C23C16/48;H01L21/20;H01L21/203;H01L21/205;H01L21/263;(IPC1-7):C30B23/08
主分类号
C30B23/08
代理机构
代理人
主权项
地址
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