发明名称 Process for forming diamond coatings using a silent discharge plasma jet process.
摘要 <p>A process for forming diamond coatings is disclosed, in which a gas or a mixture of gases is passed through a low temperature silent discharge to generate a low temperature non-equilibrium plasma gas stream, the plasma gas stream is adiabatically expanded into a region of lover pressure to ford a plasma gas stream of highly ionized and dissociated gases, a carbon-containing gas is injected into the plasma gas stream during or after the expansion into a region of lower pressure, and the plasma gas stream is then directed onto the surface of a substrate to form the diamond coating.</p>
申请公布号 EP0394735(A2) 申请公布日期 1990.10.31
申请号 EP19900106785 申请日期 1990.04.09
申请人 HERCULES INCORPORATED 发明人 CALCOTE, HARTWELL FORREST
分类号 C23C16/27;C30B29/04;C23C16/26;C23C16/513 主分类号 C23C16/27
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