发明名称 ETCHING OF ORGANIC POLYMERIC MATERIAL
摘要 An improved process for etching of polymeric materials, in particular polyimide, by reaction with either an acid or alkaline etching solution is described. A reactive material, such as aluminium metal, is added to the etching solution in order to generate nascent hydrogen. The generation of this gas promotes the etching process by increasing the etching rate and dispersion of the etch residue.
申请公布号 JPH02265932(A) 申请公布日期 1990.10.30
申请号 JP19890328601 申请日期 1989.12.20
申请人 INTERNATL BUSINESS MACH CORP <IBM> 发明人 HENRII JIYOOJI YUURUTON
分类号 C08J7/02;C08J7/12;C09K13/02;C09K13/04;H01L21/311;H05K1/03;H05K3/00;H05K3/06;H05K3/38;(IPC1-7):C08J7/12 主分类号 C08J7/02
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