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发明名称
COKIGOKINSUPATSUTATAAGETSUTOOYOBISONOSEIZOHO
摘要
申请公布号
JPH0249384(B2)
申请公布日期
1990.10.30
申请号
JP19860158755
申请日期
1986.07.08
申请人
ULVAC CORP
发明人
NAKAMURA KYUZO;OOTA YOSHIFUMI;YAMADA HIROKI;ISHIKAWA MICHIO;TANI NORIAKI;HIGUCHI YASUSHI
分类号
C22F1/10;C23C14/34
主分类号
C22F1/10
代理机构
代理人
主权项
地址
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