发明名称 Rutherford backscattering surface analyzer with 180-degree deflecting and focusing permanent magnet
摘要 A Rutherford backscattering analyzer comprising in combination: a hollow electrode, a voltage source for impressing upon said hollow electrode a positive voltage of the order of 106 volts, a first acceleration tube connected between said voltage source and ground, a second acceleration tube connected said voltage source and ground, a deflecting magnet within said terminal having pole pieces between which is supported an evacuated region connecting said acceleration tubes to each other, a source of positive helium ions, a lithium charge-exchange canal, means for analyzing said helium ions and directing them into said canal, an electron stripper within said terminal, said magnet being adapted to direct said stripped ions into said second acceleration tube for acceleration therethrough, a sample holder for holding a sample to be analyzed in the path of the ions emerging from said second acceleration tube, and means for analyzing the energy and yield of helium ions backscattered from said sample, said magnet including permanently magnetized members producing a magnetic flux of a least 3000 gauss and having a magnetic hardness no less than that of samarium cobalt.
申请公布号 US4967078(A) 申请公布日期 1990.10.30
申请号 US19900474476 申请日期 1990.02.02
申请人 GENUS, INC. 发明人 PURSER, KENNETH H.
分类号 G01Q30/20;H01J37/252;H01J49/30 主分类号 G01Q30/20
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