发明名称 Velocity monitoring method and apparatus
摘要 A velocity measuring system useful for monitoring repetitive bidirectional movements of a carrier, which supports workpieces in production, initially stores the values of a number of velocities representative of normal operation to establish a normal velocity range, and then compares the values of subsequent carrier velocities to the normal range. A continuing deviation from the normal range is indicative of defective actuator operation, allowing repair or replacement prior to hard failure and serious disruption of the production line.
申请公布号 US4967075(A) 申请公布日期 1990.10.30
申请号 US19880186685 申请日期 1988.04.21
申请人 HIGH YIELD TECHNOLOGY 发明人 BORDEN, PETER G.
分类号 H01L21/00;H01L21/68 主分类号 H01L21/00
代理机构 代理人
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