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发明名称
SEMICONDUCTOR DEVICE AND MANUFACTURE THEREOF
摘要
申请公布号
JPH02265279(A)
申请公布日期
1990.10.30
申请号
JP19890087335
申请日期
1989.04.06
申请人
TOSHIBA CORP
发明人
TAKEBUCHI MASATAKA
分类号
H01L21/8247;H01L29/788;H01L29/792;(IPC1-7):H01L29/788
主分类号
H01L21/8247
代理机构
代理人
主权项
地址
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