摘要 |
A carbon layer, a platinum layer, a zirconium oxide layer and a further platinum layer are successively applied to a ceramic substrate by vapour deposition, sputtering or spraying. Burning out the carbon layer produces a cavity for receiving a gas sample of a specified volume whose oxygen content is determined by coulombmetric titration through the zirconium oxide layer with constant potential applied to the platinum layers as electrodes. Such oxygen sensors are suitable for mass production in chip form because of the coating and burning-out technique. <IMAGE> |