发明名称 MANUFACTURE OF ACTIVE MATRIX SUBSTRATE CAPABLE OF SPOT DEFECT DETECTION AND REPAIR
摘要 <p>PURPOSE:To relieve or suppress a spot defect by evading a connection between an insulation gate type transistor(TR) for driving which has a characteristic defect or internal short circuit and a pixel electrode. CONSTITUTION:A DC voltage is applied between two signal lines 12(n) and 12(n+2), a DC voltage which turns on the insulation gate type TR 10 sufficiently or a DC voltage which turns off the TR is selected and applied to one scanning line 11(m), and the value of a current which flows between the two signal lines is measured. Then ON/OFF inspection is performed while two insulation gate type TRs 10 in addresses (m,n) and (m,n+1) are connected in series. Then a DC voltage is applied between two signal lines 12(n+1) and 12(n+3) and the value of a flowing current is measured to perform inspection while two insulation gate type TRs 10 in addresses (m,n+1) and (m,n+2) are connected in series. Thus, only normal insulation gate type TRs 10 share the pixel electrode to suppress the occurrence of a spot defect with high accuracy.</p>
申请公布号 JPH02264224(A) 申请公布日期 1990.10.29
申请号 JP19890086227 申请日期 1989.04.05
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 KAWASAKI KIYOHIRO
分类号 G02F1/13;G02F1/136;G02F1/1368;H01L21/66;(IPC1-7):G02F1/136 主分类号 G02F1/13
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