| 摘要 |
PURPOSE:To obtain the titled lamp type apparatus preventing both the pollution out of a rotary driving part and the wall deposition by constituting the apparatus so that a barrel type susceptor assembled body which is fitted on a rotary axis lengthened upward by perforating a base plate is covered with a bell jar capable of ascending and descending. CONSTITUTION:A gas phase growth apparatus is constituted by providing a bell jar 14 capable of sealing the lower end thereof on a base plate 16 and providing plural lamp houses 24 which are positioned by surrounding the outer side part of the bell jar 14 and fitted with plural lamps 23 opposing to the susceptor of the above-mentioned susceptor assembly body 11 so that the barrel type susceptor assembly body 11 holding the wafers 12 is fitted to a rotary axis 13 which is lengthened upward by perforating the base plate 16 from a driving source (not shown in the figure) provided to the lower part of the base plate 16 and a reaction chamber is formed in the circumference. In the gas phase apparatus, a feed part 33 of cooling fluid B which covers the upper part of the above-mentioned lamp houses 24 consisting of a feed part 25 of cooling fluid A is provided so that it is capable of ascending and descending by an elevating mechanism 28 together with the above-mentioned bell jar 14 in an joining state and thereby the bell jar 14 is cooled. |
