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发明名称
摘要
申请公布号
JPH0240415(Y2)
申请公布日期
1990.10.29
申请号
JP19860015858U
申请日期
1986.02.07
申请人
发明人
分类号
A47B81/00;B01D46/52;B65G1/00;B65G1/02;F24F7/06;H01L21/304;H01L21/67;H01L21/673;H01L21/68;(IPC1-7):F24F7/06
主分类号
A47B81/00
代理机构
代理人
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地址
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