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发明名称
SEMICONDUCTOR CRYSTAL GROWTH DEVICE
摘要
申请公布号
JPH02264425(A)
申请公布日期
1990.10.29
申请号
JP19890086021
申请日期
1989.04.04
申请人
MITSUBISHI ELECTRIC CORP
发明人
KUME ICHIRO
分类号
H01L21/208;(IPC1-7):H01L21/208
主分类号
H01L21/208
代理机构
代理人
主权项
地址
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