| 摘要 |
<p>PURPOSE:To fix a sensor with sufficient mechanical strength by forming a thermosensitive resistor body on an insulating base body, and providing another heating resistor in the vicinity of a boundary between the part where said thermosensitive resistor is formed and the part where said sensor is fixed. CONSTITUTION:An insulating substrate 1 is made of an alumina substrate which is coated with a nickel film through vacuum deposition. Thereafter, a thermosensitive resistor pattern 2, an auxiliary heating resistor body pattern 2' and an electrode part 3 are formed on the base plate 1 through photo-etching. After the electrode part 3 is connected with an external lead 11 by a nickel filament 12, a holder 10 is formed by molding a resin, thereby obtaining a flow sensor. Since a different heating resistor is provided between the thermosensitive resistor and the fixing part of the sensor, the change in the temperature distribution of the sensor due to an increase of the thermal capacity of the fixing part can be compensated. Thus, the sensor can be securely fixed without influencing the response characteristics.</p> |
