| 摘要 |
PURPOSE:To detect deviation of transferred laser beam with simple constitution by inputting an output signal of a photoelectric detector, comparing this with detected signal of the laser beam at the preinputted reference position and executing arithmetic processing. CONSTITUTION:At the time of detecting the deviation of the transferred position and angle of optical axis for the laser beam 5, beforehand the signal from the photoelectric detector 6 when the optical axis and angle of the laser beam 5 are the normal position and angle, and data of the deviation of the position and angle as the result, are inputted to an operation processor 19. Successively, at the time of measuring, by driving an inclining wire 13 with rotation of a pulse motor 12, the wire 13 is crossed with the laser beam 5 at one turn and the detected signal is inputted to the operation processor 19 from the photoelectric detector 6 and compared with the preinputted data at the reference position and the deviation of the transferred position and angle of the laser beam 5 can be detected. |
