| 摘要 |
PURPOSE:To prevent projecting materials from remaining in the peripheral edge parts of a material for correction by forming either one of a protective film for correction and the material for correction of a water soluble material and the other of an oil soluble material. CONSTITUTION:After one surface of a substrate 12 including patterns having defects 30, 40, 50 is coated with the protective film 60 for correction, one surface of the substrate 12 is exposed in the parts having the defects 30, 40, 50 and the exposed parts on one surface of the substrate are filled with the material 70 for correction. The protective film 60 is removed to complete the correction. Either of the protective film 60 and the material 70 is formed of the water soluble material and the other of the oil soluble material in this case. The material 70 is hardly stickable to the inner periphery of the protective film 60 if, for example, the former of the protective film 60 and the material 70 is formed to have oil repellency and the latter to have oil solubility. The projecting materials hardly remaining in this way and the effective correction is executed. |
