摘要 |
PURPOSE: To make accurate and easy to control the position and speed of the final motion part by rotating a rotary spool by a stepping motor, and adjusting the degree of overlapping of the control path with the choke of a hollow piston. CONSTITUTION: A cylinder 15 is interposed between a rod cover 13 and head cover 14 having supply ports S1 and S2 , and outside the head cover 14 a stepping motor 12 is installed, and a rotary spool 18 is made drivable. A hollow piston 17 is inserted into the cylinder 15, and in the hollow the rotary spool 18 is inserted liquid-tightly, and with its rotation, the rate of overlapping of through holes C1 and C3 in the piston 17 with a groove provided in the rotary spool 18 is controlled. This makes accurate and easy the control of the position and speed of the final motion part, and the costs of fabrication and the easiness in maintenance works are enhanced. |