ELECTROSTATIC CAPACITY TYPE PRESSURE DETECTOR

摘要

PURPOSE:To linearize a detection signal by providing each fixed electrode with an electrode main body which has a diaphragm at its center part and a support body which is made of an insulating material and joined with the peripheral edge part of the diaphragm. CONSTITUTION:Electrostatic capacities are formed between the diaphragm 9 and electrode main bodies 3 and 4 and one electrostatic capacity which is formed through the peripheral part of the diaphragm 9 and support bodies 5 and 6 and the other electrostatic capacity which is formed through the intermediate part of the diaphragm 9 are made small until they can be ignored as compared with electrostatic capacities which are formed through the center part of the diaphragm 9 and vary differentially and have linear characteristics to pressure. Consequently, the influence of electrostatic capacities at peripheral edge joint parts between the diaphragm 9 and fixed electrodes 1 and 2 can be removed and a detection signal can be linearized.