| 摘要 |
<p>PURPOSE:To stably measure flow rates from a low flow rate to a high flow rate by arranging plural straightening wire nets in a flow passage at intervals, contracting the flow passage behind the wire nets, and arranging a microflow sensor right behind the contraction of area. CONSTITUTION:The straightening wire nets 71 - 74 are arranged in an entrance- side circular tube part 2 at the specific intervals, the flow passage right behind those wire nets 71 - 74 is formed into the area contraction part 3 where the flow passage is reduced in area, and the microflow sensor 11 is arranged right behind the contraction part 3. The straightening wire nets 71 - 74 may have relatively large meshes, so clogging due to dust in a flow and a pressure drop are small and disturbance and drift are reduced. Therefore, the disturbance of the flow becomes small at the microflow sensor 11. Consequently, stable measurement is stably performed from a low flow rate to a high flow rate.</p> |
