Method of making a sintered body of aluminium nitride.

摘要

A method of making an aluminium nitride sintered body having more than 95% of relative density, more than 160W/m-K of thermal conductivity, less than 0.5 mu m, in Ra, of surface roughness, more than 10<1><2> OMEGA -cm of volume resistivity, and uniform color and homogeneous appearance. A sintering aid including 0.05-5 parts by weight, in terms of oxide, of oxides of rare earth metals and 0.01-5 parts by weight of one or more elements selected from the group consisting of metallic lithium, metallic beryllium, metallic magnesium, boron, silicon, sulfur, phosphor, arsenic and metallic zinc, is added to 100 parts by weight of powders of aluminium nitride. The mixture is subjected to forming and is sintered in a non-oxidizing atmosphere at a temperature of 1400-2000 DEG C.