WAFER TRANSFER APPARATUS,申请号JP19900039876-传众专利搜索

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发明名称	WAFER TRANSFER APPARATUS
摘要
申请公布号	JPH02261730(A)	申请公布日期	1990.10.24
申请号	JP19900039876	申请日期	1990.02.22
申请人	U S PHILIPS CORP	发明人	GIRERUMO RUISU TOROORIRA;ARAN KURISUTOFUAA ABERU;ARAN HAABEI AKIRIIZU
分类号	B65G49/00;H01L21/677;(IPC1-7):B65G49/00	主分类号	B65G49/00
代理机构		代理人
主权项
地址

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