发明名称 MUKAHAKUMAKUSAKUSEISOCHONOZURU
摘要 Spray nozzle, used in a thin-film forming device including an atomiser for the production of an atomised solution of a material which is to be applied as a thin film onto the surface of a substrate, includes a conduit 11 intended to be connected to the atomiser, a flared head 12 coupled at one of its ends to the conduit and including an outlet orifice 10 located at some distance from the inlet orifice 13, and a filter 14 disposed between the inlet and outlet orifices and having a certain number of traversing holes. The filter may include a porous body with its traversing holes oriented in various directions or in a single direction so to eject the atomised solution, or a first porous body with its traversing holes oriented in various directions and a second porous body with its traversing holes oriented in a single direction so as to eject the atomised solution, the second porous body being disposed at a location adjacent to the outlet orifice. <IMAGE>
申请公布号 JPH0247540(B2) 申请公布日期 1990.10.22
申请号 JP19840192332 申请日期 1984.09.13
申请人 KOGYO GIJUTSU INCHO;TAIYO JUDEN KK 发明人 HAYASHI YUTAKA;ITO ATSUO;IIDA HIDEYO
分类号 H01B5/14;B05B1/14;C03C17/25;C23C18/12;H01B13/00;H01L21/283;H01L21/288;H01L31/042 主分类号 H01B5/14
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