| 摘要 |
A charge of zeolite X, Y or A in Ca-form, Mg-form or (Ca,Mg)form, and wherein Si/Al atomic ratio is 0.7-3 or 1.1-2.5, is sintered at 900- 1350 deg.C to form dense, hermetic ceramic based on anorthite and/or cordierite; Na/(Si+Al) ratio is less than 0.08 and (Ca+Mg)/(Si+Al) is less than 0.11. Si/Al is pref. 1.1-1.4 and Na/(Si+Al) is less than 0.02. Temp. is pref. 950-1350 deg. C. Prod. has low thermal expansion closely matched to Si, and has electrical properties required for use as microelectronic substrate. It is an improvement compared to alumina substrates.
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