| 摘要 |
PURPOSE:To produce an optical fiber preform capable of forming a highly doped fluorine glass, by using a plurality of reaction gas introducing lines, supplying a flon gas through a line near a high-frequency plasma torch to a reaction chamber, and supplying SiCl4 through a line placed closed to the above supplying line. CONSTITUTION:An oxygen plasma flame is generated by supplying oxygen to a high-frequency plasma torch 1 as shown in the figure as the arrows. A flon gas 12 is supplied through the reaction gas introducing line 2 placed close to the plasma torch 1, and SiCl4 is introduced into the reaction chamber 4 through the reaction gas introducing line 2B placed adjacent to the reaction gas introducing line 2 using oxygen gas as the carrier gas. The introduced reactants are made to react with each other to deposit an F-doped SiO2 glass layer 7 on the target rod 6 made of quartz glass. |
