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发明名称
PRODUCTION OF THIN OXIDE FILM
摘要
申请公布号
JPH02258968(A)
申请公布日期
1990.10.19
申请号
JP19890080348
申请日期
1989.03.30
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
HIRANO RYUMA;HIRAO TAKASHI;WASA KIYOTAKA
分类号
C23C14/08
主分类号
C23C14/08
代理机构
代理人
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地址
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