| 摘要 |
PURPOSE:To improve the amorphous stability of a recording film and its resistance to oxidation and to prolong the service life of an optical recording medium by allowing the recording film mainly composed of Te to contain N and piling the recording film between a substrate and a protective coat. CONSTITUTION:An optical recording medium 20 is composed of a substrate 11, a recording film 12 formed on the front surface of the substrate and a protective coat 13 formed on the front surface of the recording film 12. For the substrate 11, inorganic materials such as glass and organic materials such as polymethyl-methacrylate can be used. The recording film 12 is a thin layer containing at least N as a main component, and may contain elements of a low melting point other than Te. To form the recording film 12 on the front surface of the substrate 11, the substrate is sputtered in mixed N and Ar gases with Te as a target, thereby forming the film. Since sputtering is carried out with a 5 to 50% flow rate of N and Ar gases, the recording film 12 possessing high amorphous stability and enhanced resistance to oxidation is obtained on the substrate 11 with satisfactory film formation properties. A protective coat 13 is formed on the formed recording film 12. |
