HIGH PROLUTION METHOD AND DEVICE FOR POSITIONING METHOD PARTICLES

摘要

PURPOSE: To improve the resolution of formed images of a smaller object by the provision of a conductive line separately from a charge collector lead wire connected to a potential near the potential of a converter. CONSTITUTION: A conductive line 18 of a charge amplifying means extracts negatively charged electrons and positive ions by ionized particles carried along T1 . All the extracted negative charges are attracted to the line 18. Charge collector lead wires 19 as a charge collector means are connected to potentials near the potential of a converter 17 or to negative potentials reverse to positive voltages of the line 18. The lead wires 19 serve symmetrically to the line 18 to collect positive ions formed through an avalanche phenomenon. The lead wires 19 are connected to an electric apparatus not shown and the collected ions are converted into visible images.