VERFAHREN ZUM HERSTELLEN EINES SENSORS ZUM BESTIMMEN VON DRUCKKRAEFTEN
摘要
The invention concerns a process for producing a sensor for the measurement of compressive forces which act on the sensor. In this process, thick-film resistors are applied to a preferably metallic substrate over conduction paths optionally on an insulating layer. The surface of the sensor is subsequently processed so that it is parallel to the underside of the substrate.
申请公布号
DE3912280(A1)
申请公布日期
1990.10.18
申请号
DE19893912280
申请日期
1989.04.14
申请人
ROBERT BOSCH GMBH, 7000 STUTTGART, DE
发明人
ZIMMERMANN, HERBERT, 7141 FREIBERG, DE;GRUENWALD, WERNER, DR. DIPL.-PHYS., 7016 GERLINGEN, DE;HECHT, HANS, DIPL.-PHYS., 7015 KORNTAL, DE;MAST, MARTIN, DIPL.-ING., 7016 GERLINGEN, DE
