METHOD FOR APPLYING A LAYER OF SUPERCONDUCTING MATERIAL AND A DEVICE SUITABLE THEREFOR

摘要

A method is described wherein different layers can be applied to substrates at a low temperature (about 400 DEG C) wherein interactions, that is, diffusion or reactions, between substrate and layers to be applied thereon are avoided as far as possible. In addition an efficient transporting of oxygen containing plasma takes place over the substrate along magnetic field lines, generated by two solenoids, because of the dimensioning of that magnetic field. Even at a pressure of only 10<-5>-10<-7> Torr the plasma will ignite. Optional passivation of a superconducting layer using an oxide layer can be performed without oxygen being extracted from the superconducting layer as sufficient oxygen can be brought into the plasma.