| 摘要 |
PURPOSE:To eliminate the defects of plastics and to obtain performance comparable to or higher than that of glass by forming a hydrogenated amorphous carbon film on the surface of a plastic optical element. CONSTITUTION:A hydrogenated amorphous carbon film is formed as at least one of optical thin films such as an antireflection coating and a polarizing film formed on the surface of a plastic optical element 1. The carbon film can be formed on the surface of the element 1 by vacuum deposition and plasma CVD with a plasma generation chamber 2 and a reaction chamber 3 is preferably adopted. When the hardness of the carbon film on the soft plastic substrate is increased upward in the thickness direction, the adhesion of the film to the substrate is improved and the stress is relieved. A plastic optical element nearly independent of humidity and having high performance and considerably improved durability is obtd. |
