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发明名称
SEMICONDUCTOR INSPECTING APPARATUS
摘要
申请公布号
JPH02256253(A)
申请公布日期
1990.10.17
申请号
JP19890015878
申请日期
1989.01.25
申请人
TOKYO ELECTRON LTD
发明人
AKIYAMA SHUJI;KITAMURA YOSHISUKE
分类号
G01R31/26;H01L21/66
主分类号
G01R31/26
代理机构
代理人
主权项
地址
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