发明名称 Shuttle system for rapidly manipulating a workpiece into and out of an atmospherically controlled chamber.
摘要 <p>An automated workpiece handling system rapidly moves a workpiece (127) into a controlled atmosphere chamber (11) such as a vacuum chamber, to a work station and withdraws the piece (127) after the work has been completed. While at the work station, the handling system manipulates the piece (127) linearly and in rotation, as desired, according to a set program. The workpiece (127) is loaded and unloaded at the same location outside the chamber (11), at atmosphere pressure. A split piston having a headstock (49) and tailstock (50) holds the workpiece (127). The piston seals the vacuum chamber (11) during loading and unloading, and during the work cycle. During transfer into the vacuum chamber (11), pressure around the workpiece is reduced. A pneumatic counterbalance system (111,143,141,109) reduces the loading on the piston drive system caused by the pressure differential between the vacuum chamber (11) and atmosphere.</p>
申请公布号 EP0392704(A1) 申请公布日期 1990.10.17
申请号 EP19900303380 申请日期 1990.03.29
申请人 CAMBRIDGE VACUUM ENGINEERING LTD. 发明人 TRILLWOOD, RICHARD E.
分类号 B23K15/06;H01J37/18;H01L21/00;H01L21/677 主分类号 B23K15/06
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