发明名称 Metallo-organic solution deposition (MOSD) of transparent, crystalline ferroelectric films
摘要 An improved process to deposit transparent, crystalline, ferroelectric films from metallo-organic solutions on platinum, glass, quartz, and sapphire substrates is disclosed. The use of this process results in a significant improvement in the transparency of perovskite, ferroelectric lead titanate (PT), lead zirconate titanate (PZT) and doped-PZT films (e.g. films doped with lanthanum, PLZT).
申请公布号 US4963390(A) 申请公布日期 1990.10.16
申请号 US19880253538 申请日期 1988.10.05
申请人 THE AEROSPACE CORPORATION 发明人 LIPELES, RUSSELL A.;COLEMAN, DIANNE J.
分类号 C03C17/25;C04B41/50;C04B41/87;C23C18/12 主分类号 C03C17/25
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