Particle detector e.g. for electron scanning microscope - has multilayer semiconductor element for collecting charged particles and producing electric signal proportional to particle density

摘要

The device detects charged particles moved by an electric field directly or indirectly to the detector. The detector has a multi-layer semiconductor element which collects the charged particles and converts them into a corresp electric signal. The semiconductor element may be a matrix and has at least one impolar transistor. The detector has a screen in front of the )semiconductor element. The screen emits light in response to the particles.