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经营范围
发明名称
Apparatus for removing small particles from a substrate
摘要
申请公布号
US4962891(A)
申请公布日期
1990.10.16
申请号
US19880280775
申请日期
1988.12.06
申请人
THE BOC GROUP, INC.
发明人
LAYDEN, LAWRENCE M.
分类号
H01L21/304;B05B1/04;B24C1/00;C01B31/22;H01L21/00
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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