| 摘要 |
This invention discloses a composite electrostatic optical apparatus and methods of using in micro fabrication processes or similar processes requiring the use of optical columns provided with electron or ion beams. The composite optical apparatus includes a series of units, each having multiple electrodes, that combine to form a composite optical structure that when coupled to a power supply define a three-dimensional potential distribution function. The shape of the composite optical structure is determined by the geometrical shape of an individual electrode and the arrangement of electrodes around the z-axis that forms a unit. The composite optical apparatus may be placed in an optical column as an electrosttic deflector, as a focusing electrostatic lens or as both deflector and focusing lens, or any combination of them. The composite optical structure enables scientific determination of an optimized potential distribution within the optical structure for minimizing focusing or deflection aberrations of electron or ion beams in an optical column. The method concerns a synthesis approach for minimizing aberrations in optical columns using the composite optical apparatus and various industrial applications.
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