PRODUCTION OF Y-CONTAINING SUPERCONDUCTING THIN FILM

摘要

PURPOSE:To synthesize a superconducting thin film having a high critical temp. at a low temp. by blowing oxygen irradiated with UV rays on a substrate when a Y-Ba-Cu-O type oxide having a specified compsn. is vacuum-deposited on the substrate to form a thin film. CONSTITUTION:When an oxide having a compsn. represented by a formula YaBabCu1-a-bOx (where a is 0.15-0.2, b is 0.3-0.35 and x is 0.95-1.05) is vacuum- deposited on a substrate in a vacuum chamber to form a thin film, oxygen acceleratedly dissociated by irradiation with UV rays is blown on the substrate and high frequency plasma is introduced into the vacuum chamber to activate evaporated atoms. By this method, a thin film having a critical temp. (Tc) higher than the b.p. of liq. nitrogen can easily be synthesized at a low temp.