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发明名称
TARGET FOR SPUTTERING
摘要
申请公布号
JPS6229144(A)
申请公布日期
1987.02.07
申请号
JP19850167344
申请日期
1985.07.29
申请人
SHINETSU ISHIEI KK
发明人
TEZUKA MOCHIO;AOYAMA MASAAKI
分类号
C03C3/06;C03C3/089;C03C3/097;C03C4/00;C23C14/08;C23C14/10;C23C14/34;H01L21/316
主分类号
C03C3/06
代理机构
代理人
主权项
地址
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