| 摘要 |
PURPOSE:To improve heat resistance as well as to obtain superior sensitivity and resolution by incorporating novolak resin obtd. by condensing halogenated phenol having a specified compsn. and a phenol deriv. with a carbonyl compd. CONSTITUTION:Novolak resin obtd. by condensing halogenated phenol represented by formula I (where R1 is halogen selected among F, C and Br) and one or more kinds of phenol derivs. selected among cresol, xylenol, tert.- butylphenol and propenylphenol with a carbonyl compd. is incorporated into a resist. A positive type resist having superior sensitivity, resolution and especially superior heat resistance or a negative type resist having superior transparency can be obtd. A diazo or azido compd. is desirably incorporated into the resist as an auxiliary sensitizer. |
