| 摘要 |
PURPOSE:To obtain a resist peeling agent small in toxicity and high in peeling ability by using a lower alkoxypropanol. CONSTITUTION:The resist peeling agent to be used comprises lower alkoxypropanol, such as 1-methoxy-2-propanol, 3-methoxy-1-propanol, 1-ethoxy-2- propanol, or 3-ethoxy-1-propanol, or a mixture of this alkoxypropanol and acetate, thus permitting the obtained resist peeling agent to be increased in dissolution speed of the resist and improved in wettability for the resist by using the acetate, low in toxicity and yet almost comparable with the peeling ability of the conventional peeling agent high in toxity of 2-ethoxyethanol, and therefore, high in utility. |
