| 摘要 |
PURPOSE:To enable a reliable vacuum seal with thin plates so as to elevate the output efficiency of X-rays of constructing the outlet window of X-rays with at least one or more curved thin plates and facing the projecting surface of at least one of the thin plates toward the X-rays. CONSTITUTION:X-rays 5 are emitted from plasma 4 produced in an X-ray generating section installed in a vacuum envelope 1, and high velocity gas flow 6 is emitted at the moment of plasma disintegration. The gas flow 6 is taken out in the atmosphere 8 on a irradiation surface 9 through an X-ray outlet window 2 and irradiated on the surface 9. And in a pressure buffer chamber 12, an atmosphere 12 filled up with a high transmission gas for X-rays such as He to a medium pressure between the pressures of the atmosphere 7 in the envelope 1 and the irradiation surface atmosphere 8 is produced. The chamber 11 is constructed so as that a thin plate 10 such as Be of the window 2 is placed projecting toward the X-rays, and supported airtightly to the inside and the outside of the envelope 1. Thereby He gas can be substituted through a gas intake 15 and a gas outlet 16 while keeping the He gas pressure constant. |
