VAPOR PHASE VAPOR DEPOSITION DEVICE,申请号JP19890074891-传众专利搜索

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发明名称	VAPOR PHASE VAPOR DEPOSITION DEVICE
摘要
申请公布号	JPH02254169(A)	申请公布日期	1990.10.12
申请号	JP19890074891	申请日期	1989.03.29
申请人	MAZDA MOTOR CORP	发明人	SUMIYA KATSUYOSHI;TAMURA KENICHI;TAKANO TADASHI;NAKAO ATSUMI
分类号	C23C16/44;C23C16/458	主分类号	C23C16/44
代理机构		代理人
主权项
地址

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