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发明名称
ETCHING
摘要
申请公布号
JPH02253621(A)
申请公布日期
1990.10.12
申请号
JP19890075330
申请日期
1989.03.27
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
KATO TOSHIAKI;HIROSE TAKASHI;INADA MASAKI
分类号
H01L21/306
主分类号
H01L21/306
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代理人
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