| 摘要 |
PURPOSE:To increase a contrast and a C/N ratio and to obtain a longer life in recording and non-recording parts by forming a plasma-polymerized film on a desired substrate by a glow discharge decomposition method using an organic metallic compound. CONSTITUTION:As an organic metallic compound that is a starting material, a cyclopentadienyl compound of La, Ce, Mn, Hg, or the like is available in addition to an organic aluminum, such as trimethyl aluminum, triethyl aluminum, and tri-isobutyl aluminum, and an organic zinc, such as dimethyl zinc and diethyl zinc. A halogenated organic compound in which a part or all of hydrogen atoms in an organic metallic compound are substituted by halogen atoms is also available. For a film forming means, a DC glow discharge decomposition method or an AC glow discharge decomposition method is suitable, and a rf glow discharge decomposition method is esp. preferably employed. For example, four types of substrates are simultaneously disposed on a counter electrode 9, and a recording material supply container 7 is filled with diphenyl tellurium. Thereafter, a recording film of approximately 100nm thickness is formed in accordance with film forming conditions. |
