| 摘要 |
PURPOSE:To obtain a sensor dispensing with grinding or the like in the production process with limited heat radiation and heater power consumption, by arranging an alumina multi-layer substrate with a built-in heater and an oxygen pump film made of stabilizing zirconia having electrodes on both sides thereof. CONSTITUTION:A heater 3 is printed on an alumina green sheet out of a Pt paste and after an induction paste the same in the composition as the alumina green sheet is printed thereon, a tiny hole 5 is made at the center of a substrate to form a cap section 1 by baking. On the other hand, a circular platinum cathode electrode 8 and a platinum anode electrode 9 are printed on a green sheet produced from stabilizing zirconia 6 to match each other, one on the surface and the other on the back. The green sheet is baked to obtain an oxygen film 10. Then, an anode electrode 11 is printed on the cap 1 and the film 10, a sealing glass 12 is printed thereon and subsequently, the film 10 is placed on the cap 1 to undergo a heat treatment as sealed. Finally, a cathode lead 13 and an anode lead 14 are arranged on the cathode electrode 8 and the anode electrode 11 respectively, and a heater lead 15 on the cap 1 to obtain an oxygen pump. |
