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发明名称
CRYSTAL GROWTH MONITORING DEVICE
摘要
申请公布号
JPH02252694(A)
申请公布日期
1990.10.11
申请号
JP19890071771
申请日期
1989.03.27
申请人
NIPPON TELEGR & TELEPH CORP <NTT>
发明人
FUERUNANDO BURIONESU;HORIKOSHI YOSHIHARU
分类号
C30B23/08;C30B25/16;G01B11/06;H01L21/203
主分类号
C30B23/08
代理机构
代理人
主权项
地址
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