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经营范围
发明名称
PROBING DEVICE
摘要
申请公布号
JPH02253167(A)
申请公布日期
1990.10.11
申请号
JP19890073989
申请日期
1989.03.28
申请人
HITACHI LTD
发明人
SAKATA TOMOAKI;HIROTA KAZUO;TAKAHASHI MICHIRO;MORI TERUYUKI;NUMATA KIYOSHI;OKUDAIRA HIROAKI
分类号
G01R1/067;G01R31/28;H01L21/66
主分类号
G01R1/067
代理机构
代理人
主权项
地址
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