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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH02252266(A)
申请公布日期
1990.10.11
申请号
JP19890071660
申请日期
1989.03.27
申请人
FUJI XEROX CO LTD
发明人
MURATA MICHIAKI;INOUE AKITAKA
分类号
H01L21/28;H01L29/423;H01L29/43;H01L29/49
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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