发明名称 KINHAKUMAKUNOETSUCHINGUHOHO
摘要 PURPOSE:To easily etch a thin gold film vacuum-deposited on a base plate, by dipping the thin gold film in an aqueous alkali hydroxide solution. CONSTITUTION:When a thin gold film vacuum-deposited on a base plate is dipped in an aqueous solution containing 1wt% or more an alkali metal hydroxide such as KOH, NaOH and LiOH, the thin gold film can be easily etched. According to this method, it is not necessary to use any special vessel for etching, noxious gas is not formed during etching, and the disposal of waste liquid is facilitated, different from an etching method using aqua regia. In addition, the etching result is equal or superior to that in the case using aqua regia.
申请公布号 JPH0245711(B2) 申请公布日期 1990.10.11
申请号 JP19810163402 申请日期 1981.10.15
申请人 DAISERU KAGAKU KOGYO KK;NITSUKO PUROSESU KK 发明人 NAKAMURA TAKASHI;HIRAISHI MASANORI
分类号 C23F1/32;C23F1/40 主分类号 C23F1/32
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