| 摘要 |
<p>PURPOSE:To obtain a humidity sensor having high reliability without change in resistance by heat treatment at a high temperature by forming the electrodes of the sensor provided with a thin film electrode, a humidity sensitive film and a protective film on an insulating board of a material containing zinc oxide as a main ingredient. CONSTITUTION:A thin film electrode 1, a humidity sensitive film 2 and a protective film 3 are provided on an alumina board 6 to form a humidity sensor. The main composition of the material of the electrode 1 is made of zinc oxide, and any of aluminum oxide, silicon, germanium, tin, lead, titanium, hafnium, zirconium is added thereto. Thus, the main composition of the electrode material contains zinc oxide to be easily manufactured, and change in resistance does not substantially occur even by heat treating at a high temperature in the atmosphere. Accordingly, a humidity sensor element of high reliability can be accurately obtained.</p> |
